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Proceedings Paper

Formation of sub-wavelength pitch regular structures employing a motorized multiple exposure Lloyd's mirror holographic lithography setup
Author(s): Dainius Virganavičius; Linas Šimatonis; Aušrine Jurkevičiūtė; Tomas Tamulevičius; Sigitas Tamulevičius
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Paper Abstract

This paper presents a custom designed, fully automated UV holographic lithography system based on Lloyd‘s mirror interferometer geometry. This system was used to record large area (50×50 mm2) 1D and 2D periodic patterns with periodicity of 288 nm in a positive tone photoresist layer spin coated on crystalline silicon substrate. Produced structures were investigated with atomic force and scanning electron microscopes.

Paper Details

Date Published: 28 August 2014
PDF: 5 pages
Proc. SPIE 9170, Nanoengineering: Fabrication, Properties, Optics, and Devices XI, 91701I (28 August 2014); doi: 10.1117/12.2061191
Show Author Affiliations
Dainius Virganavičius, Kaunas Univ. of Technology (Lithuania)
Linas Šimatonis, Kaunas Univ. of Technology (Lithuania)
Aušrine Jurkevičiūtė, Kaunas Univ. of Technology (Lithuania)
Tomas Tamulevičius, Kaunas Univ. of Technology (Lithuania)
Sigitas Tamulevičius, Kaunas Univ. of Technology (Lithuania)

Published in SPIE Proceedings Vol. 9170:
Nanoengineering: Fabrication, Properties, Optics, and Devices XI
Eva M. Campo; Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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