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Proceedings Paper

Deposition condition influence on optical properties of indium tin oxide
Author(s): Taras O. Hanulia; Olga Lopatynska; Vasyl V. Lendel; Leonid V. Poperenko
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Paper Abstract

Indium tin oxide (ITO) is a solid solution of indium (III) oxide (In2O3) and tin (IV) oxide (SnO2). It is a typical object for research in modern optoelectronics. This material combines high transparency (in the visible) and conductivity simultaneously. It is used in the production of transparent electrodes of liquid crystal screens and solar cells. The optical properties of thin films of ITO were investigated using ellipsometry. Optical constants of these films were calculated using obtained ellipsometric parameters. Films thicknesses are equal to 21-34 nm, and their refractive indices vary in interval of 2,05-2,12. Also, it was found out how the deposition conditions of ITO films influences their optical properties.

Paper Details

Date Published: 27 August 2014
PDF: 7 pages
Proc. SPIE 9172, Nanostructured Thin Films VII, 917211 (27 August 2014); doi: 10.1117/12.2061185
Show Author Affiliations
Taras O. Hanulia, National Taras Shevchenko Univ. of Kyiv (Ukraine)
Olga Lopatynska, National Taras Shevchenko Univ. of Kyiv (Ukraine)
Vasyl V. Lendel, National Taras Shevchenko Univ. of Kyiv (Ukraine)
Leonid V. Poperenko, National Taras Shevchenko Univ. of Kyiv (Ukraine)

Published in SPIE Proceedings Vol. 9172:
Nanostructured Thin Films VII
Akhlesh Lakhtakia; Tom G. Mackay; Motofumi Suzuki, Editor(s)

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