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Proceedings Paper

Germanium devices for integrated photonic circuits
Author(s): F. Kenneth Hopkins; Alexander Benken; Kevin M. Walsh; John Jones; Kent Averett
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Paper Abstract

World-wide interest in germanium-on-silicon photonics has grown enormously during the past few years. We report on our study of germanium deposition for which we found that there is potential to engineer films with significant increases in hole mobility. In addition, we report on our development of wet-etch techniques to pattern thin films and to form tapered regions of Ge, both important for the fabrication of Ge photonic devices.

Paper Details

Date Published: 18 September 2014
PDF: 5 pages
Proc. SPIE 9226, Nanophotonics and Macrophotonics for Space Environments VIII, 92260I (18 September 2014); doi: 10.1117/12.2061080
Show Author Affiliations
F. Kenneth Hopkins, Air Force Research Lab. (United States)
Alexander Benken, Univ. of Louisville (United States)
Kevin M. Walsh, Univ. of Louisville (United States)
John Jones, Air Force Research Lab. (United States)
Kent Averett, Air Force Research Lab. (United States)

Published in SPIE Proceedings Vol. 9226:
Nanophotonics and Macrophotonics for Space Environments VIII
Edward W. Taylor; David A. Cardimona, Editor(s)

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