
Proceedings Paper
Analysis of optimization method for interferometric evaluation of small shape deviationsFormat | Member Price | Non-Member Price |
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Paper Abstract
This work is focused on a description and an analysis of an optimization method for the evaluation of small deviations of
optical surface shape in interferometric testing. The proposed method does not require a detailed analysis of the
interference field as it is necessary with classical evaluation methods of interference patterns and it uses the optimization
techniques for the determination of the deviation of the tested surface from its nominal shape. This method compares
interferograms, which correspond to the nominal shape of optical surfaces, and interferograms of the tested optical
surfaces using the suitable merit function based on variance of two interference patterns. It can be used for the
comparison of two surface shapes.
Paper Details
Date Published: 18 August 2014
PDF: 10 pages
Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 920312 (18 August 2014); doi: 10.1117/12.2061001
Published in SPIE Proceedings Vol. 9203:
Interferometry XVII: Techniques and Analysis
Katherine Creath; Jan Burke; Joanna Schmit, Editor(s)
PDF: 10 pages
Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 920312 (18 August 2014); doi: 10.1117/12.2061001
Show Author Affiliations
Jiří Novák, Czech Technical Univ. in Prague (Czech Republic)
Pavel Novák, Czech Technical Univ. in Prague (Czech Republic)
Pavel Novák, Czech Technical Univ. in Prague (Czech Republic)
Antonin Mikš, Czech Technical Univ. in Prague (Czech Republic)
Published in SPIE Proceedings Vol. 9203:
Interferometry XVII: Techniques and Analysis
Katherine Creath; Jan Burke; Joanna Schmit, Editor(s)
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