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Proceedings Paper

Technological innovations for a sustainable business model in the semiconductor industry
Author(s): Harry J. Levinson
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Paper Abstract

Increasing costs of wafer processing, particularly for lithographic processes, have made it increasingly difficult to achieve simultaneous reductions in cost-per-function and area per device. Multiple patterning techniques have made possible the fabrication of circuit layouts below the resolution limit of single optical exposures but have led to significant increases in the costs of patterning. Innovative techniques, such as self-aligned double patterning (SADP) have enabled good device performance when using less expensive patterning equipment. Other innovations have directly reduced the cost of manufacturing. A number of technical challenges must be overcome to enable a return to single-exposure patterning using short wavelength optical techniques, such as EUV patterning.

Paper Details

Date Published: 5 September 2014
PDF: 6 pages
Proc. SPIE 9189, Photonic Innovations and Solutions for Complex Environments and Systems (PISCES) II, 91890E (5 September 2014); doi: 10.1117/12.2060976
Show Author Affiliations
Harry J. Levinson, GLOBALFOUNDRIES Inc. (United States)

Published in SPIE Proceedings Vol. 9189:
Photonic Innovations and Solutions for Complex Environments and Systems (PISCES) II
Akhlesh Lakhtakia; Judith A. Todd, Editor(s)

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