Proceedings Paper
Progress towards a MEMS tunable infrared filter using porous silicon| Format | Member Price | Non-Member Price |
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Paper Abstract
The unique optical properties of porous silicon show it to be a promising material for imaging and spectroscopy in the
mid-infrared and long-infrared wavelength ranges. A tunable MEMS filter using porous silicon as a high-reflectivity
layer is proposed. Measurements on fabricated porous silicon-based distributed Bragg reflectors and Fabry-Perot etalons
are presented.
Paper Details
Date Published: 28 August 2014
PDF: 8 pages
Proc. SPIE 9170, Nanoengineering: Fabrication, Properties, Optics, and Devices XI, 91700C (28 August 2014); doi: 10.1117/12.2060925
Published in SPIE Proceedings Vol. 9170:
Nanoengineering: Fabrication, Properties, Optics, and Devices XI
Eva M. Campo; Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)
PDF: 8 pages
Proc. SPIE 9170, Nanoengineering: Fabrication, Properties, Optics, and Devices XI, 91700C (28 August 2014); doi: 10.1117/12.2060925
Show Author Affiliations
Dmitry A. Kozak, National Research Council (United States)
Todd Stievater, U.S. Naval Research Lab. (United States)
Todd Stievater, U.S. Naval Research Lab. (United States)
Marcel Pruessner, U.S. Naval Research Lab. (United States)
William Rabinovich, U.S. Naval Research Lab. (United States)
William Rabinovich, U.S. Naval Research Lab. (United States)
Published in SPIE Proceedings Vol. 9170:
Nanoengineering: Fabrication, Properties, Optics, and Devices XI
Eva M. Campo; Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)
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