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Proceedings Paper

A high performance room temperature THz sensor
Author(s): Janez Trontelj; Gintaras Valušis; Rimvydas Venckevičius; Irmantas Kašalynas; Aleksander Sešek; Andrej Švigelj
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Paper Abstract

Resonant THz antenna-coupled micro-bolometers are considered as a potential candidates for room temperature THz imaging, as well as spectroscopic applications. Micromachining technology is found to be well-suitable to fabricate a micro-meter bolometer sensor suitable for MEMS implementation. The sensitivity of the sensor is determined to be up to 1000V/W and the noise equivalent power (NEP) – is down to 5pW /√Hz. The sensor parameters are designed to be easily implemented with a low cost standard preamplifier array which increases the pixel sensitivity to 106V/W without compromising the noise equivalent power.

Paper Details

Date Published: 5 September 2014
PDF: 10 pages
Proc. SPIE 9199, Terahertz Emitters, Receivers, and Applications V, 91990K (5 September 2014); doi: 10.1117/12.2060692
Show Author Affiliations
Janez Trontelj, Univ. of Ljubljana (Slovenia)
Gintaras Valušis, Ctr. for Physical Sciences and Technology (Lithuania)
Rimvydas Venckevičius, Ctr. for Physical Sciences and Technology (Lithuania)
Irmantas Kašalynas, Ctr. for Physical Sciences and Technology (Lithuania)
Aleksander Sešek, Univ. of Ljubljana (Slovenia)
Andrej Švigelj, Univ. of Ljubljana (Slovenia)

Published in SPIE Proceedings Vol. 9199:
Terahertz Emitters, Receivers, and Applications V
Manijeh Razeghi; Alexei N. Baranov; John M. Zavada; Dimitris Pavlidis, Editor(s)

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