
Proceedings Paper
Artifact-free calibration of spatial carrier interferometryFormat | Member Price | Non-Member Price |
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Paper Abstract
Spatial carrier interferometry is a well-known single frame wavefront phase measuring technique. In this
technique a large relative tilt is placed between the test and reference beams producing a high frequency
carrier fringe pattern which is modulated by the desired measurement wavefront. Implementation of spatial
carrier interferometry is relatively easily accomplished on most advanced laser interferometers. Since it is a
single frame technique, it provides robust vibration immunity, enabling measurements involving long paths or
mechanically decoupled elements as well as metrology into vacuum chambers and overall environmental
immunity. One of the major limitations of this technique is the degradation in measurement accuracy
resulting from the large wavefront tilt applied between the test and reference beams. As a result of the large
relative beam angle, the test and reference beams do not follow exactly the same path through the
interferometer, resulting in what is generally known as retrace error. In this paper an automated calibration
technique is introduced which determines the retrace error in a measurement setup without the use of a
calibration artifact. This technique works well when measuring both flat and spherical test surfaces. In both
cases, the difference between the calibrated wavefront and the wavefront measured on-axis with temporal
phase shifting is less than .05 waves. This process allows nanometer-level measurement of precision optics
even in difficult environments.
Paper Details
Date Published: 18 August 2014
PDF: 10 pages
Proc. SPIE 9204, Interferometry XVII: Advanced Applications, 920407 (18 August 2014); doi: 10.1117/12.2060559
Published in SPIE Proceedings Vol. 9204:
Interferometry XVII: Advanced Applications
Cosme Furlong; Christophe Gorecki; Peter J. de Groot; Erik L. Novak, Editor(s)
PDF: 10 pages
Proc. SPIE 9204, Interferometry XVII: Advanced Applications, 920407 (18 August 2014); doi: 10.1117/12.2060559
Show Author Affiliations
Brad Kimbrough, 4D Technology Corp. (United States)
Korbinian Prause, 4D Technology Corp. (United States)
Korbinian Prause, 4D Technology Corp. (United States)
Erik Novak, 4D Technology Corp. (United States)
Published in SPIE Proceedings Vol. 9204:
Interferometry XVII: Advanced Applications
Cosme Furlong; Christophe Gorecki; Peter J. de Groot; Erik L. Novak, Editor(s)
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