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Proceedings Paper

Practical Fabry-Perot displacement interferometry in ambient air conditions with subnanometer accuracy
Author(s): Dirk Voigt; Arthur S. van de Nes; Steven A. van den Berg
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Paper Abstract

Fabry-Perot displacement interferometry (FPI) offers high sensitivity and resolution with direct traceability to optical frequency standards. FPI can provide means for demanding calibration tasks in precision engineering and high-tech systems. We report on our investigation of the measurement methodology applied to highest precision capacitive displacement sensors. We use a dedicated metrological FPI instrumentation that provides an actuated reference target with a relatively large traceable displacement stroke. The envisaged sub-nanometer measurement uncertainty seems very challenging under practical ambient atmospheric conditions and with the necessary sensor mounting components. In anticipation of these limitations, we propose a new FPI instrumental configuration with a very short cavity and discuss expected benefits, most importantly the very low sensitivity to air refractive index variations and the versatility for practical calibration purposes. We aim again for sub-nanometer measurement uncertainty and report on the status of the experimental set-up for this short cavity FPI.

Paper Details

Date Published: 18 August 2014
PDF: 12 pages
Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 920308 (18 August 2014); doi: 10.1117/12.2060537
Show Author Affiliations
Dirk Voigt, VSL Dutch Metrology Institute (Netherlands)
Arthur S. van de Nes, VSL Dutch Metrology Institute (Netherlands)
Steven A. van den Berg, VSL Dutch Metrology Institute (Netherlands)

Published in SPIE Proceedings Vol. 9203:
Interferometry XVII: Techniques and Analysis
Katherine Creath; Jan Burke; Joanna Schmit, Editor(s)

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