Proceedings Paper
Optical fiber Fabry-Perot pressure sensor based on SU-8| Format | Member Price | Non-Member Price |
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Paper Abstract
A novel optical MEMS pressure sensor with a SU-8, microstructure is proposed. SU-8 photoresist is used to form the
high aspect ratio structure on silicon wafer. The advantage of the novel structure mainly lies in the design of separating
sensing membrane deformation with the length change of Fabry–Perot cavity. The principle of the pressure measurement
has been introduced. The mechanical model is analyzed and parameters of SU-8 structure are determined by simulation.
The fabrication process is described. Experimental results demonstrate that the sensor has a reasonable linearity,
sensitivity under micro-pressure measurement range from 0 to 0.1 MPa.
Paper Details
Date Published: 2 June 2014
PDF: 4 pages
Proc. SPIE 9157, 23rd International Conference on Optical Fibre Sensors, 915791 (2 June 2014); doi: 10.1117/12.2058514
Published in SPIE Proceedings Vol. 9157:
23rd International Conference on Optical Fibre Sensors
José M. López-Higuera; Julian D. C. Jones; Manuel López-Amo; José Luis Santos, Editor(s)
PDF: 4 pages
Proc. SPIE 9157, 23rd International Conference on Optical Fibre Sensors, 915791 (2 June 2014); doi: 10.1117/12.2058514
Show Author Affiliations
Published in SPIE Proceedings Vol. 9157:
23rd International Conference on Optical Fibre Sensors
José M. López-Higuera; Julian D. C. Jones; Manuel López-Amo; José Luis Santos, Editor(s)
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