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Proceedings Paper

Optical fiber Fabry-Perot pressure sensor based on SU-8
Author(s): Jiali Zhu; Lihua Dai; Ming Wang; Dongyan Cai; Hua Rong; Sheng Jia; Jingjing You
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Paper Abstract

A novel optical MEMS pressure sensor with a SU-8, microstructure is proposed. SU-8 photoresist is used to form the high aspect ratio structure on silicon wafer. The advantage of the novel structure mainly lies in the design of separating sensing membrane deformation with the length change of Fabry–Perot cavity. The principle of the pressure measurement has been introduced. The mechanical model is analyzed and parameters of SU-8 structure are determined by simulation. The fabrication process is described. Experimental results demonstrate that the sensor has a reasonable linearity, sensitivity under micro-pressure measurement range from 0 to 0.1 MPa.

Paper Details

Date Published: 2 June 2014
PDF: 4 pages
Proc. SPIE 9157, 23rd International Conference on Optical Fibre Sensors, 915791 (2 June 2014); doi: 10.1117/12.2058514
Show Author Affiliations
Jiali Zhu, Nanjing Normal Univ. (China)
Lihua Dai, Nanjing Normal Univ. (China)
Ming Wang, NanJing Normal Univ. (China)
Dongyan Cai, Nanjing Normal Univ. (China)
Hua Rong, Nanjing Normal Univ. (China)
Sheng Jia, Nanjing Normal Univ. (China)
Jingjing You, Nanjing Normal Univ. (China)

Published in SPIE Proceedings Vol. 9157:
23rd International Conference on Optical Fibre Sensors
José M. López-Higuera; Julian D. C. Jones; Manuel López-Amo; José Luis Santos, Editor(s)

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