In this paper, we present our developments on micro-calorimeter arrays, based on High Impedance Silicon sensors (MIS or resistive TES) micro-calorimeters and GaAS-GaAlAs HEMTs / SiGe cryo-electronics, started 5 years ago. We show the pixel design, the main steps to build a 32x32 array. We are presently developing two kinds of high impedance sensors: Metal-Insulator-Sensors and High Resistivity Transition Edge Sensors. We described our associated FrontEnd electronics and detailed system level analysis of the foreseen camera. We discuss why we will be able to handle a camera with a large number of pixels (thanks to excellent thermal insulation and no electronic power consuming at the 50mK stage). We discuss the main technological building blocks (Absorber, Sensor) and their present status.

Date Published: 24 July 2014
PDF: 10 pages
Proc. SPIE 9144, Space Telescopes and Instrumentation 2014: Ultraviolet to Gamma Ray, 91440Y (24 July 2014); doi: 10.1117/12.2056312

Published in SPIE Proceedings Vol. 9144:
Space Telescopes and Instrumentation 2014: Ultraviolet to Gamma Ray
Tadayuki Takahashi; Jan-Willem A. den Herder; Mark Bautz, Editor(s)