Share Email Print

Proceedings Paper

Application of FTIR to semiconductor emissions monitoring
Author(s): Robert L. Spellicy; J. P. LaCosse; David M. Hull; S. J. Cain; Gerald Pophal
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

A program was undertaken to evaluate FTIR for use in monitoring acid and solvent stacks in the semiconductor industry. The program consisted of an initial laboratory feasibility effort followed by field testing and ultimately a system development program. The clear result of the feasibility and field tests was that FTIR is an appropriate technology for use with these sources. In this paper we present the details of the laboratory and field tests and briefly outline the system that was developed as a result of the program. 12

Paper Details

Date Published: 10 February 1995
PDF: 10 pages
Proc. SPIE 2366, Optical Instrumentation for Gas Emissions Monitoring and Atmospheric Measurements, (10 February 1995); doi: 10.1117/12.205562
Show Author Affiliations
Robert L. Spellicy, Radian Corp. (United States)
J. P. LaCosse, Radian Corp. (United States)
David M. Hull, Radian Corp. (United States)
S. J. Cain, Radian Corp. (United States)
Gerald Pophal, Radian Corp. (United States)

Published in SPIE Proceedings Vol. 2366:
Optical Instrumentation for Gas Emissions Monitoring and Atmospheric Measurements
Michael G. Yost; Dennis K. Killinger; Joseph Leonelli; William Vaughan; Dennis K. Killinger; William Vaughan; Michael G. Yost, Editor(s)

© SPIE. Terms of Use
Back to Top