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Proceedings Paper

Realizing the diamond annular groove phase masks for the mid infrared region: five years of successful process development of diamond plasma etching
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Paper Abstract

The Annular Groove Phase Mask (AGPM) is a circularly symmetric half wave plate consisting of a circular high aspect ratio sub-wavelength grating. Here we present a method for realizing such structures in diamond. To improve the AGPM performance, antireflective sub-wavelength gratings are etched on the backside of the components, and such gratings are also discussed. Components for the N-band (around 10 μm) and the L-band (around 3.8 μm) have been successfully fabricated. We are currently developing the process further to improve the precision of the gratings and produce an AGPM for the K-band (around 2.2 μm).

Paper Details

Date Published: 7 August 2014
PDF: 9 pages
Proc. SPIE 9151, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation, 915119 (7 August 2014); doi: 10.1117/12.2055475
Show Author Affiliations
Pontus Forsberg, Uppsala Univ. (Sweden)
Ernesto Vargas, Uppsala Univ. (Sweden)
Christian Delacroix, Univ. de Liège (Belgium)
Olivier Absil, Univ. de Liège (Belgium)
Brunella Carlomagno, Univ. de Liège (Belgium)
Dimitri Mawet, European Southern Observatory (Chile)
Serge Habraken, Univ. de Liège (Belgium)
Jean Surdej, Univ. de Liège (Belgium)
Mikael Karlsson, Uppsala Univ. (Sweden)

Published in SPIE Proceedings Vol. 9151:
Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation
Ramón Navarro; Colin R. Cunningham; Allison A. Barto, Editor(s)

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