
Proceedings Paper
Realizing the diamond annular groove phase masks for the mid infrared region: five years of successful process development of diamond plasma etchingFormat | Member Price | Non-Member Price |
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Paper Abstract
The Annular Groove Phase Mask (AGPM) is a circularly symmetric half wave plate consisting of a circular high aspect
ratio sub-wavelength grating. Here we present a method for realizing such structures in diamond. To improve the AGPM
performance, antireflective sub-wavelength gratings are etched on the backside of the components, and such gratings are
also discussed. Components for the N-band (around 10 μm) and the L-band (around 3.8 μm) have been successfully
fabricated. We are currently developing the process further to improve the precision of the gratings and produce an
AGPM for the K-band (around 2.2 μm).
Paper Details
Date Published: 7 August 2014
PDF: 9 pages
Proc. SPIE 9151, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation, 915119 (7 August 2014); doi: 10.1117/12.2055475
Published in SPIE Proceedings Vol. 9151:
Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation
Ramón Navarro; Colin R. Cunningham; Allison A. Barto, Editor(s)
PDF: 9 pages
Proc. SPIE 9151, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation, 915119 (7 August 2014); doi: 10.1117/12.2055475
Show Author Affiliations
Pontus Forsberg, Uppsala Univ. (Sweden)
Ernesto Vargas, Uppsala Univ. (Sweden)
Christian Delacroix, Univ. de Liège (Belgium)
Olivier Absil, Univ. de Liège (Belgium)
Brunella Carlomagno, Univ. de Liège (Belgium)
Ernesto Vargas, Uppsala Univ. (Sweden)
Christian Delacroix, Univ. de Liège (Belgium)
Olivier Absil, Univ. de Liège (Belgium)
Brunella Carlomagno, Univ. de Liège (Belgium)
Dimitri Mawet, European Southern Observatory (Chile)
Serge Habraken, Univ. de Liège (Belgium)
Jean Surdej, Univ. de Liège (Belgium)
Mikael Karlsson, Uppsala Univ. (Sweden)
Serge Habraken, Univ. de Liège (Belgium)
Jean Surdej, Univ. de Liège (Belgium)
Mikael Karlsson, Uppsala Univ. (Sweden)
Published in SPIE Proceedings Vol. 9151:
Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation
Ramón Navarro; Colin R. Cunningham; Allison A. Barto, Editor(s)
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