The develop of Volume Phase Holographic Gratings (VPHGs) working as echelle grating is reported based on binary structures. A mask lithography process was developed to produce the patterns on SU8 photoresist. The binary pattern with 50 l/mm were regular and defect free. The samples were characterized by different duty cycles, which is a key parameter in defining the diffraction efficiency in such binary gratings. The efficiency has been measured at different wavelengths and for different orders. The results have been compared with those obtained by simulations.

Date Published: 28 July 2014
PDF: 8 pages
Proc. SPIE 9151, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation, 91511I (28 July 2014); doi: 10.1117/12.2055328

Published in SPIE Proceedings Vol. 9151:
Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation
Ramón Navarro; Colin R. Cunningham; Allison A. Barto, Editor(s)