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Proceedings Paper

Effects of substrate temperature on morphology, structure and chemical composition of Cu2S films
Author(s): Bing Ren; Jian Huang; Lin Wang; Ke Tang; Kaifeng Qin; Zhangmin Pan; Linjun Wang; Yiben Xia
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Paper Abstract

Cu2S thin films have been deposited on CdS/ITO (In2O3:Sn) substrates with various substrate temperatures by DC magnetron sputtering method. The effects of substrate temperature on the crystallization behavior and morphology are studied. Chemical composition of the films is confirmed by energy dispersive X-ray (EDX) spectroscopy. X-ray diffraction (XRD) analysis of the films reveals they have polycrystalline chalcocite structure with (110) texture. Field emission scanning electron microscopy (FESEM) show the crystalline nature of the films at higher substrate temperature, which is in accordance with XRD measurements. Stoichiometric analysis exhibits element composition with Cu/S concentrations ratio equal to 2 approximately.

Paper Details

Date Published: 16 December 2013
PDF: 5 pages
Proc. SPIE 9068, Eighth International Conference on Thin Film Physics and Applications, 90680L (16 December 2013); doi: 10.1117/12.2054098
Show Author Affiliations
Bing Ren, Shanghai Univ. (China)
Jian Huang, Shanghai Univ. (China)
Lin Wang, Shanghai Univ. (China)
Ke Tang, Shanghai Univ. (China)
Kaifeng Qin, Shanghai Univ. (China)
Zhangmin Pan, Shanghai Univ. (China)
Linjun Wang, Shanghai Univ. (China)
Yiben Xia, Shanghai Univ. (China)

Published in SPIE Proceedings Vol. 9068:
Eighth International Conference on Thin Film Physics and Applications
Junhao Chu; Chunrui Wang, Editor(s)

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