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Proceedings Paper

Novel techniques for the fabrication of ridge waveguides in lithium niobate
Author(s): Wei-Lin Chen; Der-Jung Chen; Way-Seen Wang
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Paper Abstract

Single-mode nickel-diffused ridge waveguides in lithium niobate were fabricated by a combination of nickel diffusion and proton-exchanged wet etching techniques. The nickel diffusion is carried out at 800 degree(s)C for 1.5 hr and the ridge pattern fabrication process starts with a masked proton exchange to induce domain inversion in lithium niobate and then followed by etching away the exchanged areas with a mixture of hydrofluoric acid and nitric acid. An alternative sequence of ridge pattern fabrication and nickel diffusion is also investigated. The SEM graphs show that smooth waveguide surface is obtained. The measured output optical intensity profiles of the ridge waveguide were also shown.

Paper Details

Date Published: 17 March 1995
PDF: 6 pages
Proc. SPIE 2401, Functional Photonic Integrated Circuits, (17 March 1995); doi: 10.1117/12.205035
Show Author Affiliations
Wei-Lin Chen, National Taiwan Univ. (Taiwan)
Der-Jung Chen, National Taiwan Univ. (Taiwan)
Way-Seen Wang, National Taiwan Univ. (Taiwan)

Published in SPIE Proceedings Vol. 2401:
Functional Photonic Integrated Circuits
Mario Nicola Armenise; Ka-Kha Wong, Editor(s)

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