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Proceedings Paper

Pulsed-power microwave surface discharge in vacuum for diamond-like films deposition
Author(s): Alexander A. Ravaev; Alexander V. Medvedovsky; Pavel S. Chernyshev
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Paper Abstract

This paper is devoted to a new method of depositing diamond-like films onto various substrates by use of a plasma flare generated by a surface discharge on a carbon target in vacuum under action of intense pulsed microwave (MW) beam. The first part of the report presents a brief review of experimental investigations of nonlinear interaction of strong microwaves (X-band, MW intensities of 0.01-10 MW/cm2, and pulse duration of 50-100 ns, 1-100 microsecond(s) ) with a plasma flare. A generation of strong Lengmuir waves and the following electron acceleration in a plasma resonance region cause an effective transformation of a MW energy into a plasma flare, a creation of high plasma potentials, and a production of ions with energies from thermal to as high as tens keV. The second part reflects the first experiments on pulsed MW deposition of diamond-like films on various substrates. Deposition rate up to 0.5 micrometers per 1 sec of a 'net' MW irradiation time was reached, and diamond- like films with good optical characteristics were obtained. The small plasma-reactor bench, other obtained practical results, and technique perspectives are discussed in detail.

Paper Details

Date Published: 3 March 1995
PDF: 9 pages
Proc. SPIE 2374, Novel Applications of Lasers and Pulsed Power, (3 March 1995); doi: 10.1117/12.204992
Show Author Affiliations
Alexander A. Ravaev, Moscow Radiotechnical Institute (Russia)
Alexander V. Medvedovsky, Moscow Radiotechnical Institute (Russia)
Pavel S. Chernyshev, Moscow Radiotechnical Institute (Russia)

Published in SPIE Proceedings Vol. 2374:
Novel Applications of Lasers and Pulsed Power
Michael W. Prairie; Randy D. Curry, Editor(s)

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