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Proceedings Paper

NovaTube: first excimer laser design for quasi-sealed-off operation
Author(s): Ulrich Rebhan; Bernard K. Nikolaus; Frank Voss; Dirk Basting; Rainer Paetzel
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Paper Abstract

Excimer lasers are the most efficient and powerful sources for ultraviolet radiation. Our new laser cavity design NovaTubeTM is the result of many years of extensive material research. Several test runs with NovaTubeTM lasers at 193 nm (ArF) and 157 nm (F2) demonstrated excellent gas lifetime data when compared to conventionally designed lasers. For the first time a 50 W KrF laser was successfully operated sealed-off for more than 1 billion pulses. By this outstanding performance the operating costs can be cut 10 times using the new laser tube technology.

Paper Details

Date Published: 31 March 1995
PDF: 7 pages
Proc. SPIE 2502, Gas Flow and Chemical Lasers: Tenth International Symposium, (31 March 1995);
Show Author Affiliations
Ulrich Rebhan, Lambda Physik GmbH (Germany)
Bernard K. Nikolaus, Lambda Physik GmbH (Germany)
Frank Voss, Lambda Physik GmbH (Germany)
Dirk Basting, Lambda Physik GmbH (Germany)
Rainer Paetzel, Lambda Physik GmbH (Germany)

Published in SPIE Proceedings Vol. 2502:
Gas Flow and Chemical Lasers: Tenth International Symposium
Willy L. Bohn; Helmut Huegel, Editor(s)

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