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Proceedings Paper

Development of fast DSA simulation method using OCTA system
Author(s): Hiroshi Morita
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Paper Abstract

We proposed the DSA simulation technique which is the combined method of two dimensional (2D) SCF and three dimensional (3D) dissipative particle dynamics (DPD) methods by using the density biased Monte Carlo method. This combined method has advantages of both an accuracy of SCF and fast and stably-working simulation of 3D DPD methods regardless of the strong segregation regime. Using our techniques, several results, such as DSA film structure on the chemical guide, are obtained. We also discuss the availability of our simulation technique using our free software, OCTA (in detail, see system.

Paper Details

Date Published: 28 March 2014
PDF: 8 pages
Proc. SPIE 9049, Alternative Lithographic Technologies VI, 90492O (28 March 2014); doi: 10.1117/12.2046090
Show Author Affiliations
Hiroshi Morita, National Institute of Advanced Industrial Science and Technology (Japan)

Published in SPIE Proceedings Vol. 9049:
Alternative Lithographic Technologies VI
Douglas J. Resnick; Christopher Bencher, Editor(s)

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