The accuracy of stylus profilometer sensor directly affects the performance of the profilometer. To ensure good status of the profilometer, the accuracy features of the profilometer sensor should be verified regularly. However by now, only standard samples with comprehensive parameters are adopted for verification of the total profilometer, and there is no verification device for stylus profilometer sensor, especially for that with large range and high resolution. In this paper, a special verification device for stylus profilometer sensor is introduced. The device consists of displacement generation unit, displacement measurement unit and data acquisition and feature analysis software unit. A motor and PZT are combined to be a large range and high resolution displacement generator in the displacement generation unit, and a grating interference displacement measurement unit gives standard value of the displacement. When a sensor should be verified, the displacement generation unit generates displacement within the measuring range of the stylus sensor, and the displacement is input to the sensor, the output of the senor is compared with the data measured by the grating interference displacement measurement unit, and the acquisition and feature analysis software unit shows the accuracy features of the stylus sensor. A double frequency laser interferometer is applied to the verification device for experimental testing, its high accuracy, stability, reliability and wide range is verified, which satisfies the large-scale verification requirement of stylus profilometer sensor.

Date Published: 10 October 2013
PDF: 7 pages
Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 891647 (10 October 2013); doi: 10.1117/12.2041638

Published in SPIE Proceedings Vol. 8916:
Sixth International Symposium on Precision Mechanical Measurements
Shenghua Ye; Yetai Fei, Editor(s)