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Proceedings Paper

Stimulated Brillouin scattering at 248 nm for application to lensless imaging
Author(s): Anton K. Pfau; Detlev Proch; Friedrich G. Bachmann
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Paper Abstract

This contribution describes the results of an investigative study of the use of a commercial narrow band excimer laser in photolithography. The technique for image projection involves the use of phase conjugate mirrors which we produced by stimulated Brillouin scattering . Feature sizes down to 80 m could be projected. Attempts to transfer smaller structures failed since diffraction effects led to an inflation of the focal volume, which eventually reduced the power density below the threshold for stimulated Brillouin scattering. As will be shown the properties of the commercial light source represent the major obstacle towards a substantial improvement in the imaging performance.

Paper Details

Date Published: 1 August 1990
PDF: 11 pages
Proc. SPIE 1271, Adaptive Optics and Optical Structures, (1 August 1990); doi: 10.1117/12.20402
Show Author Affiliations
Anton K. Pfau, Max Planck Institut fuer Quantenoptik (Germany)
Detlev Proch, Max Planck Institut fuer Quantenoptik (Germany)
Friedrich G. Bachmann, Siemens AG (Germany)

Published in SPIE Proceedings Vol. 1271:
Adaptive Optics and Optical Structures
Joachim J. Schulte-in-den-Baeumen; Robert K. Tyson, Editor(s)

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