Proceedings Paper
Laser-induced damage thresholds and optical constants of ion-plated and ion-beam-sputtered Al2O3 and HfO2 coatings for the ultraviolet| Format | Member Price | Non-Member Price |
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Paper Abstract
For high power laser applications, extinction coefficients and refractive indices of ion beam sputtered
resp. ionplated Hf02-, Si02- and A1203- films were determined by spectrophotometric analysis in the wavelength
range between 200 and 500 nm. Film qualities were related to the corresponding process parameters. Qualitative
information about water content has been obtained by infrared spectroscopy. Impurities and film stoichiometry
were determined by RBS analysis. Laser induced damage thresholds were measured with a (KrF*)excimer laser
at 248 nm. The tested samples were single layers as well as high reflecting QWOT stacks. All results were
compared with the corresponding values of e-beam coatings.
Paper Details
Date Published: 1 August 1990
PDF: 6 pages
Proc. SPIE 1270, Optical Thin Films and Applications, (1 August 1990); doi: 10.1117/12.20391
Published in SPIE Proceedings Vol. 1270:
Optical Thin Films and Applications
Reinhard Herrmann, Editor(s)
PDF: 6 pages
Proc. SPIE 1270, Optical Thin Films and Applications, (1 August 1990); doi: 10.1117/12.20391
Show Author Affiliations
Alexandra Starke, Technische Univ. Berlin (Germany)
Harald Schink, Univ. Hannover (Germany)
Harald Schink, Univ. Hannover (Germany)
Jurgen Kolbe, Univ. Hannover (Germany)
Johanes Ebert, Univ. Hannover (Germany)
Johanes Ebert, Univ. Hannover (Germany)
Published in SPIE Proceedings Vol. 1270:
Optical Thin Films and Applications
Reinhard Herrmann, Editor(s)
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