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Proceedings Paper

Ellipsometry of thin uniaxial layers
Author(s): Andrew Y. Tronin; Valery N. Filippov; Alisa F. Konstantinova; Michael M. Karpuk
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Paper Abstract

Reviewed are the approaches for the determination of the optical constants - refraction indices, absorption coefficients and thickness of thin uniaxial film with various optical axis orientations, arbitrary among them. The comparative analysis of various measurements - MAI (multi angle of incidence ellipsometry), MTE (multi film thickness ellipsometry), IHE (multi immersion ellipsometry) and MOE (multi orientation ellipsometry) and corresponding techniques for solving the inverse task is given for each type of optical axis orientation.

Paper Details

Date Published: 1 August 1990
PDF: 8 pages
Proc. SPIE 1270, Optical Thin Films and Applications, (1 August 1990); doi: 10.1117/12.20389
Show Author Affiliations
Andrew Y. Tronin, Institute of Crystallography (Russia)
Valery N. Filippov, Institute of Physics (Belarus)
Alisa F. Konstantinova, Institute of Crystallography (Russia)
Michael M. Karpuk, Institute of Physics (Belarus)

Published in SPIE Proceedings Vol. 1270:
Optical Thin Films and Applications
Reinhard Herrmann, Editor(s)

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