The limiting thickness uniformity attainable for the coating of multiple substrates inside a thermal evaporation physical vapor deposition (PVD) unit is theoretically analyzed. This study compares the classical spherical (dome-shaped) calotte with a plane sectors reversible lens holder setup. This arrangement is very useful for two-sides substrate deposition, such as antireflection coatings on lenses. The design of static correcting shutters for this kind of configuration is also discussed. Some results of this theoretical study are presented.

Date Published: 1 August 1990
PDF: 7 pages
Proc. SPIE 1270, Optical Thin Films and Applications, (1 August 1990); doi: 10.1117/12.20388

Published in SPIE Proceedings Vol. 1270:
Optical Thin Films and Applications
Reinhard Herrmann, Editor(s)