Share Email Print

Proceedings Paper

Developments in in-situ ellipsometer monitoring of thin film growth during reactive ion plating deposition
Author(s): Steven Savrda; Marc D. Himel; Karl H. Guenther; Frank K. Urban III
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

In situ ellipsometry is of interest for monitoring and control of growing films. Its extreme sensitivity to thin layers also allows the measurement of the interface film frequently formed between a growing film and the substrate. The installation and operation of an in situ system on two different vacuum coating machines is described. The system records 'F and measurements every 5 seconds during film growth. We present an algorithm for computing the thickness (d) and index (n'.ik) of a growing and an interface film on a known substrate from five Y and measurements at different times during film growth. Numerical solutions of the ellipsometer equations for d, n, and k performed using a 25 MHz 80386 microprocessor with an 80387 math co-processor require about 30 minutes. Additional solutions beyond the first five data sets require only two additional measurements. By taking data in repeated time intervals during the growth of a film, we obtain a depth profile of its optical properties.

Paper Details

Date Published: 1 August 1990
PDF: 14 pages
Proc. SPIE 1270, Optical Thin Films and Applications, (1 August 1990); doi: 10.1117/12.20372
Show Author Affiliations
Steven Savrda, CREOL/Univ. of Central Florida (United States)
Marc D. Himel, CREOL/Univ. of Central Florida (United States)
Karl H. Guenther, CREOL/Univ. of Central Florida (United States)
Frank K. Urban III, Univ. of Miami (United States)

Published in SPIE Proceedings Vol. 1270:
Optical Thin Films and Applications
Reinhard Herrmann, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?