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Proceedings Paper

MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range
Author(s): Jussi H. Mäkynen; Mikko Tuohiniemi; Antti Näsilä; Rami Mannila; Jarkko E. Antila
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Paper Abstract

VTT Technical research centre of Finland has developed a MEMS Fabry-Perot interferometer (FPI) for the wavelength range from 7.5 μm to 9.5 μm. The device consists of two Distributed Bragg Reflectors (DBR) manufactured with MEMS processing techniques. The full width half maximum of the transmission peak is 150nm. This transmission peak can be tuned from 7.5 μm to 9.5 μm by applying a control voltage from 0 V to 30 V. A laboratory demonstrator has been put together to show the use of this module as a part of a spectral measurement setup. Several gas samples have been measured with the setup and compared against measurement results found in literature.

Paper Details

Date Published: 7 March 2014
PDF: 8 pages
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U (7 March 2014); doi: 10.1117/12.2036272
Show Author Affiliations
Jussi H. Mäkynen, VTT Technical Research Ctr. of Finland (Finland)
Mikko Tuohiniemi, VTT Technical Research Ctr. of Finland (Finland)
Antti Näsilä, VTT Technical Research Ctr. of Finland (Finland)
Rami Mannila, VTT Technical Research Ctr. of Finland (Finland)
Jarkko E. Antila, VTT Technical Research Ctr. of Finland (Finland)

Published in SPIE Proceedings Vol. 8977:
MOEMS and Miniaturized Systems XIII
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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