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Proceedings Paper

Merged photonic crystal slot waveguide: confining slow modes in tiny volumes
Author(s): M. Roussey; A. Bera; P. Stenberg; S. Honkanen; M. Kuittinen
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Paper Abstract

In this proceeding we are describing the optimization of a silicon slot waveguide coated with titanium dioxide deposited by Atomic Layer Deposition. In addition we show the characterization of a photonic crystal cavity directly patterned on a slot waveguide.

Paper Details

Date Published: 19 February 2014
PDF: 7 pages
Proc. SPIE 8994, Photonic and Phononic Properties of Engineered Nanostructures IV, 89940C (19 February 2014); doi: 10.1117/12.2036258
Show Author Affiliations
M. Roussey, Univ. of Eastern Finland (Finland)
A. Bera, Univ. of Eastern Finland (Finland)
P. Stenberg, Univ. of Eastern Finland (Finland)
S. Honkanen, Univ. of Eastern Finland (Finland)
M. Kuittinen, Univ. of Eastern Finland (Finland)

Published in SPIE Proceedings Vol. 8994:
Photonic and Phononic Properties of Engineered Nanostructures IV
Ali Adibi; Shawn-Yu Lin; Axel Scherer, Editor(s)

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