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Proceedings Paper

Laser surface processing of thin films for microelectronics applications
Author(s): Mikio Takai
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Paper Abstract

Laser maskless patterning of magnetic thin films and transparent electrode films for microelectronics application has been performed to realize higher precision and higher rate processes than conventional techniques. Single crystalline ferrite and metallic alloy thin films such as FeAlSi, FeZrN, and CoZrNb have been etched without a mask in chemical solutions to realize magnetic head gap structures for future applications. Indium tin oxide (ITO) thin films on a glass substrate have been etched by laser ablation to provide a maskless patterning process for flat panel display (FPD) fabrication. Laser cleaning has been applied to a magnetic head slider and glass substrates as an alternative technique to conventional wet cleaning processes.

Paper Details

Date Published: 1 March 1995
PDF: 9 pages
Proc. SPIE 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, (1 March 1995); doi: 10.1117/12.203607
Show Author Affiliations
Mikio Takai, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 2498:
Laser Methods of Surface Treatment and Modification: ALT '94 International Conference
Alexander M. Prokhorov; Vladimir I. Pustovoy, Editor(s)

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