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Proceedings Paper

Experimental research on anti-vibration interferometry based on time-frequency-domain analysis
Author(s): Yao Hu; Qun Hao; Fanghua Zhang; Yuhan Tian
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Paper Abstract

Phase-shifting interferometry is a non-contact precision precise measuring method for optical surface, but it is highly sensitive to external vibrations. A time-and-frequency-domain (TFD) anti-noise phase-shifting interferometry is proposed to eliminate the effect of vibrations and improve the precision of measurement. According to simulations and preliminary experiments, active phase-shifting speed as well as interferogram capture speed should be increased to improve the anti-vibration capability of the TFD method. In this paper, a fast phase-shifting approach based on PZT actuator and interferogram detection with high-speed camera is proposed. Preliminary experimental results are given to demonstrate the approach.

Paper Details

Date Published: 10 October 2013
PDF: 6 pages
Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 89161Z (10 October 2013); doi: 10.1117/12.2035878
Show Author Affiliations
Yao Hu, Beijing Institute of Technology (China)
Qun Hao, Beijing Institute of Technology (China)
Fanghua Zhang, Beijing Institute of Technology (China)
Yuhan Tian, Beijing Institute of Technology (China)

Published in SPIE Proceedings Vol. 8916:
Sixth International Symposium on Precision Mechanical Measurements
Shenghua Ye; Yetai Fei, Editor(s)

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