The measurement of miniature components with a micro- or nano-coordinate measuring machine requires a high precision contact scanning probe. The elastic mechanism of low stiffness is a major component of the contact scanning probe. A new elastic mechanism is analyzed by the theory of elasticity and finite element analysis in this paper. It is to realize the probe’s mechanical behavior and stiffness when designing an elastic mechanism for a contact scanning probe. The contact scanning probe is composed of a tungsten stylus with a ruby ball tip, a mechanism of floating plate suspended by four V-shaped leaf springs, and a 3D optical sensor. The leaf spring experiences elastic deformation when a contact force is applied. Uniform stiffness model is analyzed. Simulation and experimental results verify the correctness of the analysis.

Date Published: 10 October 2013
PDF: 10 pages
Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 89160P (10 October 2013); doi: 10.1117/12.2035794

Published in SPIE Proceedings Vol. 8916:
Sixth International Symposium on Precision Mechanical Measurements
Shenghua Ye; Yetai Fei, Editor(s)