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Proceedings Paper

Infrared-laser-induced decomposition of tetravinylsilane for deposition of SixC1-x coatings
Author(s): V. Drinek; Z. Bastl; J. Subrt; M. Urbanova; Josef Pola
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Paper Abstract

CO2 laser induced infrared multiphoton decomposition of tetravinylsilane affords a variety of gaseous hydrocarbons and Si/C/H films wherein the relative content of Si and C is affected by the temperature of the substrate.

Paper Details

Date Published: 8 March 1995
PDF: 3 pages
Proc. SPIE 2461, ROMOPTO '94: Fourth Conference in Optics, (8 March 1995); doi: 10.1117/12.203532
Show Author Affiliations
V. Drinek, Institute of Chemical Process Fundamentals (Czech Republic)
Z. Bastl, J. Heyrovsky Institute of Physical Chemistry (Czech Republic)
J. Subrt, Institute of Inorganic Chemistry (Czech Republic)
M. Urbanova, Institute of Chemical Process Fundamentals (Czech Republic)
Josef Pola, Institute of Chemical Process Fundamentals (Czech Republic)


Published in SPIE Proceedings Vol. 2461:
ROMOPTO '94: Fourth Conference in Optics
Valentin I. Vlad, Editor(s)

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