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Proceedings Paper

Fabrication and replication of micro-optical structures for growth of GaN-based light emitting diodes
Author(s): G. Gervinskas; G. Seniutinas; A. Vijayakumar; S. Bhattacharya; E. Jelmakas; A. Kadys; R. Tomašiūnas; S. Juodkazis
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Paper Abstract

GaN light emitting diodes (LEDs) on sapphire substrates can be improved by micro-patterning substrate to perform epitaxial over-growth which drastically reduces defects' density in the light emitting region. We patterned Al2O3 with focused ion beam and show a successful overgrowth of GaN. The exact shape of pattern milled into Al2O3 was replicated into a 0.4-mm-thick shim of Ni by electroplating. The surface roughness of Ni was ~5:5 ±2 nm and is applicable for the most demanding replication of nano-rough surfaces. This technique can be used to replicate at micro-optical elements Fresnel-axicons defined by electron beam lithography made on sub-1 mm areas without stitching errors (Raith EBL). Shimming of macro-optical elements such as car back- reflectors is also demonstrated. Ni-shimming opens possibility to make replicas of nano-textured small and large area patterns and use them for thermal embossing and molding of optically-functionalized micro-fluidic chips and macro-optical elements.

Paper Details

Date Published: 7 December 2013
PDF: 10 pages
Proc. SPIE 8923, Micro/Nano Materials, Devices, and Systems, 89234L (7 December 2013); doi: 10.1117/12.2033709
Show Author Affiliations
G. Gervinskas, Swinburne Univ. of Technology (Australia)
Australian National Fabrication Facility (Australia)
G. Seniutinas, Swinburne Univ. of Technology (Australia)
Australian National Fabrication Facility (Australia)
A. Vijayakumar, Indian Institute of Technology Madras (India)
S. Bhattacharya, Indian Institute of Technology Madras (India)
E. Jelmakas, Vilnius Univ. (Lithuania)
A. Kadys, Vilnius Univ. (Lithuania)
R. Tomašiūnas, Vilnius Univ. (Lithuania)
S. Juodkazis, Swinburne Univ. of Technology (Australia)
Australian National Fabrication Facility (Australia)

Published in SPIE Proceedings Vol. 8923:
Micro/Nano Materials, Devices, and Systems
James Friend; H. Hoe Tan, Editor(s)

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