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Proceedings Paper

Infrared transmission characteristic of indium-tin-oxide thin films prepared by femtosecond pulsed laser deposition
Author(s): Xubo Zhu; Weiguo Sun; Fei Tao; Xiancun Cao; Xiaolei Zhang
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Paper Abstract

Indium tin oxide (ITO) films were deposited on sapphire substrates at temperatures ranging from 30°C to 700°C and oxygen background pressure changing from 0.05 Pa to 0.25 Pa by femtosecond pulsed laser deposition (PLD). The films were characterized using metallurgical microscope, film resistance meter and Fourier transform infrared spectrometer to study the effect of substrate temperature and oxygen background pressure on the surface topography, sheet resistance and infrared transmission. The photographs of metallurgical microscope show that substrate temperature plays a dominant role on the surface morphology of the films. The sheet resistance test suggests that the sheet resistance of the film decreases with increase of substrate temperature but increases with increase of oxygen background pressure. The results of infrared transmission show that the infrared transmission through the ITO film is about 40% at the wavelength of 1.5μm to 1.8μm and is very low at other infrared band. The films deposited at higher substrate temperatures show lower value of transmittance, and which at higher oxygen background pressure show higher value of transmittance.

Paper Details

Date Published: 11 September 2013
PDF: 6 pages
Proc. SPIE 8907, International Symposium on Photoelectronic Detection and Imaging 2013: Infrared Imaging and Applications, 89072X (11 September 2013); doi: 10.1117/12.2033172
Show Author Affiliations
Xubo Zhu, Luoyang Optoelectro Technology Development Ctr. (China)
Weiguo Sun, Luoyang Optoelectro Technology Development Ctr. (China)
Fei Tao, Luoyang Optoelectro Technology Development Ctr. (China)
Xiancun Cao, Luoyang Optoelectro Technology Development Ctr. (China)
Xiaolei Zhang, Luoyang Optoelectro Technology Development Ctr. (China)


Published in SPIE Proceedings Vol. 8907:
International Symposium on Photoelectronic Detection and Imaging 2013: Infrared Imaging and Applications
Haimei Gong; Zelin Shi; Qian Chen; Jin Lu, Editor(s)

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