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Proceedings Paper

Light scattering method: inspection of diamond turning process
Author(s): Haiming Wang; Hangyu Mi
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Paper Abstract

A novel method for simultaneously measuring of form and roughness of the diamond turned surfaces has been developed. A laser beam has been applied to scan the surface under test the scattering patterns have been received by a CCD array with 2048 sensor elements the deviation of the specular reflection gives the information of the surface slope which can be integrated to yield the surface form. The surface roughness is described by scattering pattern. Furthermore the scattering patterns can also be used to diagnose the working conditions of the machine which is used to manufacture the optical surface under test. Finally some factors which have influences on the light scattering method have also been discussed. I .

Paper Details

Date Published: 1 August 1990
PDF: 11 pages
Proc. SPIE 1266, In-Process Optical Measurements and Industrial Methods, (1 August 1990); doi: 10.1117/12.20273
Show Author Affiliations
Haiming Wang, National Applied Optics Lab. (China)
Hangyu Mi, Hefei Institute of Intelligent (China)

Published in SPIE Proceedings Vol. 1266:
In-Process Optical Measurements and Industrial Methods
H. A. Macleod; Peter Langenbeck, Editor(s)

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