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Proceedings Paper

In-situ film thickness monitoring in CVD and other thin film deposition processes
Author(s): Piet J. Severin
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Paper Abstract

An optical-fibre sensor based on the phase of the signal reflected from a stack of 5i02/Si3N4 layers grown on silica in LPCVD is described in detail. This sensor is an example of a rather straightforward embodiment within the wide range of possible reflection-based optical fibre sensors. The various options allowing more refined solutions matched to the measurement problem are discussed in more general terms. 1.

Paper Details

Date Published: 1 August 1990
PDF: 7 pages
Proc. SPIE 1266, In-Process Optical Measurements and Industrial Methods, (1 August 1990); doi: 10.1117/12.20267
Show Author Affiliations
Piet J. Severin, Philips Research Labs. (Netherlands)

Published in SPIE Proceedings Vol. 1266:
In-Process Optical Measurements and Industrial Methods
H. A. Macleod; Peter Langenbeck, Editor(s)

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