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Proceedings Paper

Infrared wire grid polarizers: metrology and modeling
Author(s): Matthew C. George; Jonathon Bergquist; Rumyana Petrova; Bin Wang; Eric Gardner
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Paper Abstract

Broad and narrow-band wire grid polarizer (WGP) products suitable for MWIR and LWIR applications requiring high contrast were developed on antireflection (AR) coated silicon using Moxtek nanowire patterning capabilities. Accurate metrology was gathered in both transmission and reflection from the SWIR to LWIR using a combination of FTIR and dispersive spectrometers, as well as laser-based light sources. The WGP structures were analyzed using SEM, FIB, and STEM techniques and optical data was derived from IR VASE, transmission, and reflectance measurements. Modeling of device performance was achieved using rigorous coupled wave analysis. Laser damage thresholds were determined and various damage mechanisms identified.

Paper Details

Date Published: 27 September 2013
PDF: 16 pages
Proc. SPIE 8873, Polarization Science and Remote Sensing VI, 887302 (27 September 2013); doi: 10.1117/12.2024752
Show Author Affiliations
Matthew C. George, MOXTEK, Inc. (United States)
Jonathon Bergquist, MOXTEK, Inc. (United States)
Rumyana Petrova, MOXTEK, Inc. (United States)
Bin Wang, MOXTEK, Inc. (United States)
Eric Gardner, MOXTEK, Inc. (United States)

Published in SPIE Proceedings Vol. 8873:
Polarization Science and Remote Sensing VI
Joseph A. Shaw; Daniel A. LeMaster, Editor(s)

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