The use of linear methods to obtain both the error surface and the instrument error from redundant-independent datasets has been proposed to improve the accuracy of angle measuring scanning devices such as the long trace profilometer (LTP) or the nanometer optical measuring machine (NOM). In this work we propose to extend the method to measurements obtained during the calibration of mechanical benders. The proposed method allows determining an error-free measure of the slope error, the curvature and the cubic component of the mirror, as well as the instrument error. The description of the method, simulations and practical works are presented.

Date Published: 27 September 2013
PDF: 8 pages
Proc. SPIE 8848, Advances in X-Ray/EUV Optics and Components VIII, 88480K (27 September 2013); doi: 10.1117/12.2024510

Published in SPIE Proceedings Vol. 8848:
Advances in X-Ray/EUV Optics and Components VIII
Ali Khounsary; Shunji Goto; Christian Morawe, Editor(s)