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Proceedings Paper

X-ray mirror metrology using SCOTS/deflectometry
Author(s): Run Huang; Peng Su; James H. Burge; Mourad Idir
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Paper Abstract

SCOTS is a high precision slope measurement technology based on deflectometry. Light pattern on a LCD display illuminates the test surface and its reflected image is used to calculate the surface slope. SCOTS provides a high dynamic range full field measurement of the optics without null optics required. We report SCOTS tests on X-ray mirrors to nm and even sub nm level with precise calibration of the test system. A LCD screen with dots/check board pattern was aligned into the system at the test mirror position to calibrate camera imaging distortion in-situ. System errors were further eliminated by testing and subtracting a reference flat which was also aligned at the same position as the test mirror. A virtual reference based on the ideal shape of the test surface was calculated and subtracted from the test raw data. This makes the test a ‘virtual null’ test. Two X-ray mirrors were tested with SCOTS. 0.1μrad (rms) slope precision and sub nm (rms) surface accuracy were achieved.

Paper Details

Date Published: 27 September 2013
PDF: 6 pages
Proc. SPIE 8848, Advances in X-Ray/EUV Optics and Components VIII, 88480G (27 September 2013); doi: 10.1117/12.2024500
Show Author Affiliations
Run Huang, College of Optical Sciences, The Univ. of Arizona (United States)
Peng Su, College of Optical Sciences, The Univ. of Arizona (United States)
James H. Burge, College of Optical Sciences, The Univ. of Arizona (United States)
Mourad Idir, Brookhaven National Lab. (United States)

Published in SPIE Proceedings Vol. 8848:
Advances in X-Ray/EUV Optics and Components VIII
Ali Khounsary; Shunji Goto; Christian Morawe, Editor(s)

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