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Proceedings Paper

Evaluation and optimization of the Savitzky-Golay smoothing filter for noise reduction in thin film interference signal analysis
Author(s): Petros I. Stavroulakis; Panos Liatsis; Nicholas Tipping; Paul Craddock
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Paper Abstract

In this work, we present a comparison between Savitzky-Golay filtering and the traditional treatment of subtracting a dark signal to reduce noise from thin film interference spectra, acquired by a spectrometer in an adaptive system, where integration time needs to be varied for each measurement. We show that both classical Savitzky-Golay and dark signal removal are not optimal for interference spectra, however by applying a gradual variation of the Savitzky-Golay bin parameters across the signal, an adaptive version of the Savitsky-Golay technique can be used as a general-purpose noise reduction method for signals collected by an adaptive thin film thickness measurement system.

Paper Details

Date Published: 30 September 2013
PDF: 16 pages
Proc. SPIE 8842, Novel Optical Systems Design and Optimization XVI, 88420H (30 September 2013); doi: 10.1117/12.2024031
Show Author Affiliations
Petros I. Stavroulakis, City Univ. London (United Kingdom)
Panos Liatsis, City Univ. London (United Kingdom)
Nicholas Tipping, Sencon (UK) Ltd. (United Kingdom)
Paul Craddock, Sencon (UK) Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 8842:
Novel Optical Systems Design and Optimization XVI
G. Groot Gregory; Arthur J. Davis, Editor(s)

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