
Proceedings Paper
Development of a numerically controlled elastic emission machining system for fabricating mandrels of ellipsoidal focusing mirrors used in soft x-ray microscopyFormat | Member Price | Non-Member Price |
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Paper Abstract
Ellipsoidal mirrors are one of the most promising types of X-ray mirror, because the mirror can focus X-rays to
nanometer size with a large aperture and no chromatic aberration. However, so far ideal ellipsoidal mirrors cannot be
realized by any manufacturing methods. One of the reasons is there is no fabrication method to process their inside
surface with a diameter of several millimeters with nanometer-level accuracy. We propose and develop a manufacturing
process of the ellipsoidal mirror. First, a master which has the reversed shape is prepared using grinding, polishing and
Elastic Emission Machining (EEM). EEM can finish the surface shape to within 2nm (RMS). Then, the ellipsoidal mirror
is produced by replicating the surface using an electroforming deposition method. By conducting the process without any
stress at room temperature, replicating the surface roughness and shape with nanometer order accuracy is possible. In
this paper, we report the current status of manufacturing of the ellipsoidal mirror.
Paper Details
Date Published: 27 September 2013
PDF: 10 pages
Proc. SPIE 8848, Advances in X-Ray/EUV Optics and Components VIII, 88480C (27 September 2013); doi: 10.1117/12.2023940
Published in SPIE Proceedings Vol. 8848:
Advances in X-Ray/EUV Optics and Components VIII
Ali Khounsary; Shunji Goto; Christian Morawe, Editor(s)
PDF: 10 pages
Proc. SPIE 8848, Advances in X-Ray/EUV Optics and Components VIII, 88480C (27 September 2013); doi: 10.1117/12.2023940
Show Author Affiliations
Yoshinori Takei, The Univ. of Tokyo (Japan)
Takehiro Kume, The Univ. of Tokyo (Japan)
Hiroto Motoyama, The Univ. of Tokyo (Japan)
Takehiro Kume, The Univ. of Tokyo (Japan)
Hiroto Motoyama, The Univ. of Tokyo (Japan)
Kentaro Hiraguri, Natsume Optical Corp. (Japan)
Hirokazu Hashizume, Natsume Optical Corp. (Japan)
Hidekazu Mimura, The Univ. of Tokyo (Japan)
Hirokazu Hashizume, Natsume Optical Corp. (Japan)
Hidekazu Mimura, The Univ. of Tokyo (Japan)
Published in SPIE Proceedings Vol. 8848:
Advances in X-Ray/EUV Optics and Components VIII
Ali Khounsary; Shunji Goto; Christian Morawe, Editor(s)
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