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Proceedings Paper

Sparse microdefect evaluation system for large fine optical surfaces based on dark-field microscopic scattering imaging
Author(s): Yongying Yang; Shitong Wang; Xiaoyu Chen; Lu Li; Pin Cao; Lu Yan; Zhongtao Cheng; Dong Liu
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Paper Abstract

It is considered challenging to evaluate the sparse microdefects of large optical surfaces because the microdefects are usually of microns while the test samples are of hundreds of millimeters. Most of the existing methods encounter problems such as uncertainty and inefficiency in eyeballing, inconsequence between laser source and international standard, limitation of detecting area, qualitative but not quantitative nor standard measurement of defects, etc. In this paper, a dark-field microscopic scattering imaging system for microdefects evaluation is introduced. The principle of the proposed surface microdefect evaluation system will be presented and the experiment results on evaluating numerous of test samples will be given.

Paper Details

Date Published: 7 September 2013
PDF: 9 pages
Proc. SPIE 8838, Optical Manufacturing and Testing X, 883806 (7 September 2013); doi: 10.1117/12.2023438
Show Author Affiliations
Yongying Yang, Zhejiang Univ. (China)
Shitong Wang, Zhejiang Univ. (China)
Xiaoyu Chen, Zhejiang Univ. (China)
Lu Li, Zhejiang Univ. (China)
Pin Cao, Zhejiang Univ. (China)
Lu Yan, Zhejiang Univ. (China)
Zhongtao Cheng, Zhejiang Univ. (China)
Dong Liu, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 8838:
Optical Manufacturing and Testing X
Oliver W. Fähnle; Ray Williamson; Dae Wook Kim, Editor(s)

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