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Proceedings Paper

Development of achromatic full-field x-ray microscopy with compact imaging mirror system
Author(s): S. Matsuyama; Y. Emi; H. Kino; Y. Sano; Y. Kohmura; K. Tamasaku; M. Yabashi; T. Ishikawa; K. Yamauchi
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Paper Abstract

Compact advanced Kirkpatrick–Baez optics are used to construct a microscope that is easy to align and robust against vibrations and thermal drifts. The entire length of the imaging mirror system is 286 mm, which is 34% shorter than the previous model. A spatial resolution test is performed in which magnified bright-field images of a pattern are taken with an X-ray camera at an energy of 10 keV at the BL29XUL beamline of SPring-8. A line-and-space pattern having a 50- nm width could be resolved, although the image contrast is low.

Paper Details

Date Published: 26 September 2013
PDF: 8 pages
Proc. SPIE 8851, X-Ray Nanoimaging: Instruments and Methods, 885107 (26 September 2013); doi: 10.1117/12.2023152
Show Author Affiliations
S. Matsuyama, Osaka Univ. (Japan)
Y. Emi, Osaka Univ. (Japan)
H. Kino, Osaka Univ. (Japan)
Y. Sano, Osaka Univ. (Japan)
Y. Kohmura, SPring-8/RIKEN (Japan)
K. Tamasaku, SPring-8/RIKEN (Japan)
M. Yabashi, SPring-8/RIKEN (Japan)
T. Ishikawa, SPring-8/RIKEN (Japan)
K. Yamauchi, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 8851:
X-Ray Nanoimaging: Instruments and Methods
Barry Lai, Editor(s)

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