Share Email Print

Proceedings Paper

Development of achromatic full-field x-ray microscopy with compact imaging mirror system
Author(s): S. Matsuyama; Y. Emi; H. Kino; Y. Sano; Y. Kohmura; K. Tamasaku; M. Yabashi; T. Ishikawa; K. Yamauchi
Format Member Price Non-Member Price
PDF $17.00 $21.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Compact advanced Kirkpatrick–Baez optics are used to construct a microscope that is easy to align and robust against vibrations and thermal drifts. The entire length of the imaging mirror system is 286 mm, which is 34% shorter than the previous model. A spatial resolution test is performed in which magnified bright-field images of a pattern are taken with an X-ray camera at an energy of 10 keV at the BL29XUL beamline of SPring-8. A line-and-space pattern having a 50- nm width could be resolved, although the image contrast is low.

Paper Details

Date Published: 26 September 2013
PDF: 8 pages
Proc. SPIE 8851, X-Ray Nanoimaging: Instruments and Methods, 885107 (26 September 2013); doi: 10.1117/12.2023152
Show Author Affiliations
S. Matsuyama, Osaka Univ. (Japan)
Y. Emi, Osaka Univ. (Japan)
H. Kino, Osaka Univ. (Japan)
Y. Sano, Osaka Univ. (Japan)
Y. Kohmura, SPring-8/RIKEN (Japan)
K. Tamasaku, SPring-8/RIKEN (Japan)
M. Yabashi, SPring-8/RIKEN (Japan)
T. Ishikawa, SPring-8/RIKEN (Japan)
K. Yamauchi, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 8851:
X-Ray Nanoimaging: Instruments and Methods
Barry Lai, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?