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Proceedings Paper

Measurement of aspheres and free-form surfaces in a non-null test interferometer: reconstruction of high-frequency errors
Author(s): Goran Baer; Johannes Schindler; Jens Siepmann; Christof Pruß; Wolfgang Osten; Michael Schulz
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Paper Abstract

The tilted wave interferometer is a non-null test interferometer for the measurement of aspheres and freeform surfaces without dedicated null-optics that uses an array of tilted waves to locally compensate the deviation of the surface from the spherical form. The concept allows for short measurement times of only a few minutes and high lateral resolutions at the same time. The calculation of the surface error is performed by perturbation of a polynomial representation of the surface. Since we are also interested in higher frequency errors of the surface which cannot be described by a polynomial of finite order these errors are evaluated in an additional step. Since every wavefront only covers a small area of the surface the challenge here is to reconstruct the surface from the information that is distributed over the different patches. We will present the method that was developed for the reconstruction of these high frequency errors as well as measurement results of aspheres and freeform surfaces without rotational symmetry that were obtained by this method.

Paper Details

Date Published: 13 May 2013
PDF: 7 pages
Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 878818 (13 May 2013); doi: 10.1117/12.2021518
Show Author Affiliations
Goran Baer, Univ. Stuttgart (Germany)
Johannes Schindler, Univ. Stuttgart (Germany)
Jens Siepmann, Mahr GmbH (Germany)
Christof Pruß, Univ. Stuttgart (Germany)
Wolfgang Osten, Univ. Stuttgart (Germany)
Michael Schulz, Physikalisch-Technische Bundesanstalt (Germany)

Published in SPIE Proceedings Vol. 8788:
Optical Measurement Systems for Industrial Inspection VIII
Peter H. Lehmann; Wolfgang Osten; Armando Albertazzi, Editor(s)

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