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Proceedings Paper

A new polishing process for large-aperture and high-precision aspheric surface
Author(s): Xuqing Nie; Shengyi Li; Yifan Dai; Ci Song
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Paper Abstract

The high-precision aspheric surface is hard to be achieved due to the mid-spatial frequency error in the finishing step. The influence of mid-spatial frequency error is studied through the simulations and experiments. In this paper, a new polishing process based on magnetorheological finishing (MRF), smooth polishing (SP) and ion beam figuring (IBF) is proposed. A 400mm aperture parabolic surface is polished with this new process. The smooth polishing (SP) is applied after rough machining to control the MSF error. In the middle finishing step, most of low-spatial frequency error is removed by MRF rapidly, then the mid-spatial frequency error is restricted by SP, finally ion beam figuring is used to finish the surface. The surface accuracy is improved from the initial 37.691nm (rms, 95% aperture) to the final 4.195nm. The results show that the new polishing process is effective to manufacture large-aperture and high-precision aspheric surface.

Paper Details

Date Published: 9 July 2013
PDF: 7 pages
Proc. SPIE 8786, Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers, 87860R (9 July 2013); doi: 10.1117/12.2020992
Show Author Affiliations
Xuqing Nie, National Univ. of Defense Technology (China)
Shengyi Li, National Univ. of Defense Technology (China)
Yifan Dai, National Univ. of Defense Technology (China)
Ci Song, National Univ. of Defense Technology (China)

Published in SPIE Proceedings Vol. 8786:
Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers
Jianda Shao; Takahisa Jitsuno; Wolfgang Rudolph, Editor(s)

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