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Proceedings Paper

One-dimensional surface profile measurement by detection of reflecting direction of a scanned laser beam
Author(s): Osami Sasaki; Ryo Shinozaki; Takamasa Suzuki
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Paper Abstract

A laser beam is scanned on an object surface with a fast scanning system which consists of a rotating mirror, a flat mirror, and a concave spherical mirror. Propagation direction of the laser beam reflected by a sample surface is detected with a lens and a position sensitive detector. A one-dimensional surface profile of the sample surface is measured by integrating a slop distribution obtained from the propagation direction of the reflected beam. The measurement is insensitivity to mechanical vibrations because of a high-speed scanning of a few milliseconds. The required positioning accuracy of the sample surface is lower than a few millimeters. The measurement repeatability is less than 10 nm.

Paper Details

Date Published: 22 June 2013
PDF: 6 pages
Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 876919 (22 June 2013); doi: 10.1117/12.2020983
Show Author Affiliations
Osami Sasaki, Niigata Univ. (Japan)
Ryo Shinozaki, Union Tool Co. (Japan)
Takamasa Suzuki, Niigata Univ. (Japan)

Published in SPIE Proceedings Vol. 8769:
International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013)
Chenggen Quan; Kemao Qian; Anand Asundi, Editor(s)

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