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Proceedings Paper

Alternative discretization in the aperiodic Fourier modal method leading to reduction in computational costs
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Paper Abstract

The Fourier modal method (FMM), also referred to as Rigorous Coupled-Wave Analysis (RCWA), is based on Fourier-mode expansions and is inherently built for periodic structures such as diffraction gratings. When the infinite periodicity assumption is not realistic, the finiteness of the structure has to be incorporated into the model. In this paper we discuss the recent extensions of the FMM for finite structures. First, we explain how an efficient FMM-based method for finite structures is obtained by a reformulation of the governing equations and incorporation of perfectly matched layers (PMLs). Then we show that the computational cost of the method can be further reduced by employing an alternative discretization instead of the classical one. Numerical results demonstrate the characteristics of the discussed FMM-based methods and include a discussion of computational complexities.

Paper Details

Date Published: 13 May 2013
PDF: 11 pages
Proc. SPIE 8789, Modeling Aspects in Optical Metrology IV, 87890K (13 May 2013); doi: 10.1117/12.2020851
Show Author Affiliations
M. Pisarenco, ASML Research (Netherlands)
I. D. Setija, ASML Research (Netherlands)

Published in SPIE Proceedings Vol. 8789:
Modeling Aspects in Optical Metrology IV
Bernd Bodermann; Karsten Frenner; Richard M. Silver, Editor(s)

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