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Proceedings Paper

Gated imaging for multi-layer wave-front sensing and surface reconstruction
Author(s): ChingSeong Tan; Xin Wang; Wee Keong Lim; Yong Han Ng; Tong Yuen Chai
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Paper Abstract

Recently, semiconductor manufacturers have been striving for high speed, large scale multi-layer wafer surface measurement. In this paper, we propose a novel technique in multi-layer wave-front sensing. The measurement uses a gated camera in pico second shutter that can be synchronized to a pico second laser pulse, up to μm accuracy. Subsequently, we propose a compensation technique using time-of-flight wave-front sensing to reconstruct the multilayer surfaces using our proposed gated imaging technique.

Paper Details

Date Published: 22 June 2013
PDF: 6 pages
Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87690B (22 June 2013); doi: 10.1117/12.2020845
Show Author Affiliations
ChingSeong Tan, Multimedia Univ. (Malaysia)
Xin Wang, Monash Univ. (Malaysia)
Wee Keong Lim, Multimedia Univ. (Malaysia)
Yong Han Ng, Univ. Tunku Abdul Rahman (Malaysia)
Tong Yuen Chai, Univ. Tunku Abdul Rahman (Malaysia)

Published in SPIE Proceedings Vol. 8769:
International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013)
Chenggen Quan; Kemao Qian; Anand Asundi, Editor(s)

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