A scanning white light interferometer can characterize out of plane features and motion in M(N)EMS devices. Like any other form and displacement measuring instrument, the scanning interferometer results should be linked to the metre definition to be comparable and unambiguous. Traceability is built up by careful error characterization and calibration of the interferometer. The main challenge in this calibration is to have a reference device producing accurate and reproducible dynamic out-of-plane displacement when submitted to standard loads. We use a flat mirror attached to a piezoelectric transducer for static and (quasi)dynamic calibration of a stroboscopic scanning light interferometer. First we calibrated the piezo-scanned flexure guided transducer stage using a symmetric differential heterodyne laser interferometer developed at the Centre for Metrology and Accreditation (MIKES). The standard uncertainty of the piezo stage motion calibration was 3.0 nm. Then we used the piezo-stage as a transfer standard to calibrate our stroboscopic interferometer whose light source was pulsed at 200 Hz and 400 Hz with 0.5% duty cycle. We measured the static position and (quasi)dynamic motion of the attached mirror relative to a reference surface. This methodology permits calibrating the vertical scale of the stroboscopic scanning white light interferometer.

Date Published: 13 May 2013
PDF: 9 pages
Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 87883J (13 May 2013); doi: 10.1117/12.2020525

Published in SPIE Proceedings Vol. 8788:
Optical Measurement Systems for Industrial Inspection VIII
Peter H. Lehmann; Wolfgang Osten; Armando Albertazzi, Editor(s)